A NOVEL MEMS RESPIRATORY FLOW SENSOR

ABSTRACT: A novel CMOS-process-compatible MEMS sensor for monitoring respiration is presented. This resistive flow sensor was manufactured by the TSMC 0.35 ¿m CMOS/MEMS mixed-signal 2P4M polycide process. The sensor was demonstrated to be sensitive enough to detect...

A SMART SENSOR NETWORK FOR SEA WATER QUALITY MONITORING

ABSTRACT: Measurement of chlorophyll concentration is gaining more-and-more importance in evaluating the status of the marine ecosystem. For wide areas monitoring a reliable architecture of wireless sensors network is required. In this paper, we present a network of...